Axcelis Technologies

Boston, Massachusetts

A Global Leader in Ion implants chooses Critical Systems

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Axcelis Technologies is a global leader in innovative, high-productivity ion implant systems designed to meet the needs of semiconductor manufacturers. After 25 years, the rooftop unit on its Boston headquarters began to show signs of aging and posed a threat to the company’s stringent temperature control requirements. Upon investigating replacement solutions, the engineers determined that the cooling capacity had to be increased by approximately 30 nominal cooling tons, without adding to the buildings current structural and electrical design.

Critical Systems analyzed Axcelis’ situation to identify the only manufacturer able to meet these criteria. The new unit combined aluminum construction and a wrap-around heat pipe to increase dehumidification capacity. The project was delivered on time and on budget, with unrivalled emphasis on construction quality and performance.

Project profile
  • OWNER
    Axcelis Technologies
  • ARCHITECT
    IDC Architects
  • MEP ENGINEER
    IDC Architects
  • MECHANICAL CONTRACTOR
    ATCO Group
  • SQUARE FEET
    160 000
  • HVAC TECHNOLOGY
    Energy Recovery Dedicated Outside Air Delivery Systems in a lab environment.